Micro guide for MEMS structure and Manufacturing Method Thereof

摘要

Disclosed are a micro-guide for a MEMS structure and a manufacturing method thereof. A micro-guide according to one embodiment of the present invention is a micro-guide (400) provided between two surfaces carrying out relative motion of a micro-electromechanical system (MEMS) structure so as to prevent the friction and abrasion between the two surfaces, and comprises: bearing balls (100) in a spherical shape; a top plate (200) having a plurality of grooves (210) formed to be arranged in one direction and adjacent to each other; and a lower plate (300) having grooves (310) formed in the same size and shape as the grooves (210) on a surface corresponding to the top plate (200). The bearing balls (100) are positioned between the grooves (210) of the top plate (200) and the grooves (310) of the lower plate (300) and serve as bearings for reducing the friction between the top plate (200) and the lower plate (300). The pitch (P) between the adjacent ones of the grooves (210, 310) is 105-175% with reference to the diameter (D) of the bearing balls (100). The lateral length (L) of the top plane surfaces (211, 311) of the peak portions formed between the grooves (210, 310) is 25% or less with reference to the diameter (D) of the bearing balls (100).