发明名称 FORCE DETECTION DEVICE, ROBOT, ELECTRONIC COMPONENT TRANSPORT DEVICE, ELECTRONIC COMPONENT INSPECTION DEVICE, COMPONENT PROCESSING DEVICE, AND MOVING BODY
摘要 PROBLEM TO BE SOLVED: To provide a force detection device capable of reducing deformation and stress of a first circuit board provided with an element, preventing the element and the first circuit board from being broken, and improving precision of force detection, a robot, an electronic component transport device, an electronic component inspection device, a component processing device, and a moving body.SOLUTION: A force detection device includes: a first substrate; a second substrate arranged opposite the first substrate; and a plurality of first circuit boards which are provided between the first substrate and second substrate, and provided with an element outputting a signal corresponding to external force. Each first circuit board is arranged along a plane direction of the first circuit board. The respective first circuit boards are in the same shape in plane view of the first circuit board.
申请公布号 JP2014196924(A) 申请公布日期 2014.10.16
申请号 JP20130071931 申请日期 2013.03.29
申请人 SEIKO EPSON CORP 发明人 MATSUMOTO TAKANOBU;URANO OSAMU
分类号 G01L5/16;B25J19/02 主分类号 G01L5/16
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