| 摘要 |
PROBLEM TO BE SOLVED: To provide a copper foil with carrier having high adhesion force between a carrier and an ultrathin copper foil before a lamination process to an insulation base plate, and easily being peeled at a carrier/ultrathin copper foil boundary surface after the lamination process to the insulation base plate.SOLUTION: An intermediate layer of a copper foil with carrier contains nickel and chrome. E(x) is defined as E(x)=∫e(x)dx/(∫e(x)dx+∫f(x)dx+∫g(x)dx+∫h(x)dx+∫i(x)dx+∫j(x)dx+∫k(x)dx), where e(x), f(x), g(x), h(x), i(x), j(x), k(x) are atomic percentages of chrome, zinc, nickel, copper, oxygen, carbon, and others, respectively, and x (nm) is a depth into the intermediate layer for a carrier from a surface of the intermediate layer for the carrier, in the depth direction analysis. Then E(x) satisfies 1 to 30% over a section of x in a range of 0 to 1.0, when peeling according to JISC-6471 between the intermediate layer and the ultrathin copper layer. A variation coefficient of chrome concentration Xsatisfies 40.0% or less and an arithmetic mean value of 20 points of E(x) satisfies 1 to 30%, where &sgr;is a standard deviation of E(x), E(x) is measured at 10 points with 20 mm interval in a width direction and at 10 points with 20 mm interval in a longer direction, and the variation coefficient of chrome concentration Xis calculated from a formula of X=&sgr;×100/(20 points arithmetic mean value of E(x)). |
