| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a heat-conduction-type atmospheric pressure sensor having a simple structure and circuit configuration without need of using electrostatic attraction drive and resonance, serving as exciting means for vibrating a conventional membrane.SOLUTION: A membrane temperature sensor, heating means, and exciting means are provided on a cantilever-shaped membrane. The exciting means uses warpage due to difference in thermal expansion of two principal layers constituting the membrane while intermittently heated by the heating means of a membrane heater. A silicon layer and a silicon thermally oxidized film with extremely large difference in their thermal expansion coefficients are used as the two principal layers.</p> |
