发明名称 |
Method and System for Controlling Radio Frequency Power |
摘要 |
A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse. |
申请公布号 |
US2014306742(A1) |
申请公布日期 |
2014.10.16 |
申请号 |
US201414151321 |
申请日期 |
2014.01.09 |
申请人 |
MKS Instruments, Inc. |
发明人 |
Menzer David;Schuss Jack J.;Ambrosina Jesse E. |
分类号 |
H03K5/01 |
主分类号 |
H03K5/01 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method of power delivery, comprising:
delivering power from a power delivery system in a continuous-wave mode to a load; generating a signal in a feedback loop to control the delivered power, the signal correlated to a power control algorithm; and adjusting a single variable in the power control algorithm to transition the delivered power from the continuous-wave mode to a pulsed mode. |
地址 |
Andover MA US |