发明名称 Method and System for Controlling Radio Frequency Power
摘要 A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
申请公布号 US2014306742(A1) 申请公布日期 2014.10.16
申请号 US201414151321 申请日期 2014.01.09
申请人 MKS Instruments, Inc. 发明人 Menzer David;Schuss Jack J.;Ambrosina Jesse E.
分类号 H03K5/01 主分类号 H03K5/01
代理机构 代理人
主权项 1. A method of power delivery, comprising: delivering power from a power delivery system in a continuous-wave mode to a load; generating a signal in a feedback loop to control the delivered power, the signal correlated to a power control algorithm; and adjusting a single variable in the power control algorithm to transition the delivered power from the continuous-wave mode to a pulsed mode.
地址 Andover MA US