Distance measuring apparatus using phase-locked synthetic wavelength interferometer based on femtosecond laser

摘要

The present invention relates to a femtosecond laser based distance measurement device. More specifically, the present invention relates to a distance measurement device which uses a femtosecond laser based phase-locked composite wave interferometer to maintain constant phases between composite waves and enable distance measurement by measuring repetition rate of femtosecond laser in order to achieve high resolving power equal to or less than 1μm and remove nonlinear error due to phase. According to the present invention, no limitation exists in a distance to be measured, high resolving power equal to or less than 1μm is realized by a locked phase, and periodic nonlinear error is not caused.