| 摘要 |
PURPOSE: A planar multi-stage thermoelectric module and a method for fabricate the same are provided to improve thermoelectric performance by stacking at least two thermoelectric elements in a planar direction. CONSTITUTION: An insulation membrane is formed on a substrate. A thermoelectric element (100) is formed on the insulation membrane. The thermoelectric element includes thermoelectric cells (10,20). The thermoelectric cells and a thermoelectric thin film are electrically connected by electrode lines (15,25). The thermoelectric element is multistage-arranged in the planar direction of the insulation membrane. |
