发明名称 ULTRASONIC TRANSDUCER DEVICE, PROBE, ELECTRONIC DEVICE, AND ULTRASONIC IMAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an ultrasonic transducer device that avoids an increase in wiring resistance while including a piezoelectric film per vibrating film.SOLUTION: In a base 21, a plurality of vibrating films 24 are arranged in an array form. On the vibrating films 24, piezoelectric films 53 are formed on first electrode films 27. Second electrode films 26 are formed on the piezoelectric films 53. First conductive films 54 formed with a thickness larger than that of the first electrode films 27 are connected to the first electrode films 27. The first conductive films 54 function as wiring films of the first electrode films 27. The first conductive films 54 have a sufficient thickness.
申请公布号 JP2014195494(A) 申请公布日期 2014.10.16
申请号 JP20130071582 申请日期 2013.03.29
申请人 SEIKO EPSON CORP 发明人 KIYOSE SETSUNAI;SUZUKI HIRONORI;MATSUDA YOJI
分类号 A61B8/00;H01L41/047;H01L41/09;H01L41/113;H01L41/29;H04R17/00 主分类号 A61B8/00
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