| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a force detection device etc., that can suppress transfer of heat generated by a second circuit board to a first circuit board and improve precision of force detection, and also can be made compact.SOLUTION: A force detection device includes: a first substrate 2; a second substrate 3 arranged opposite the first substrate; a first circuit board 4 which is provided between the first substrate 2 and second substrate 3, and provided with an element 10 outputting electric charges corresponding to external force and a charge/voltage conversion part converting the electric charges into a voltage; a second circuit board 5 which is provided between the first substrate 2 and second substrate 3, arranged opposite the first circuit board 4 apart from the first circuit board, and provided with an AD conversion part converting an analog signal into a digital signal; and a plurality of fixing members 71 for fixing the first substrate 2 and second substrate 3, the element 10 and second substrate 3 being in contact with each other and the second circuit board 5 and first substrate 2 being in contact with each other.</p> |
