BETA-KETOIMINE LIGAND, METHOD OF PREPARING THE SAME, METAL COMPLEX COMPRISING THE SAME AND METHOD OF FORMING THIN FILM USING THE SAME

摘要

The β-ketoimine ligand is represented by the following formula 1:;;wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the β-ketoimine ligand. A method of forming the β-ketoimine ligand and a method of forming a thin film using the metal complex compound including β-ketoimine ligand are provided.

主权项

1. A β-ketoimine compound represented by the following Formula 1: wherein R1 and R2 are each independently a C1-C5 alkyl group.