LIGHT SOURCE DEVICE, AND EXPOSURE DEVICE PROVIDED WITH LIGHT SOURCE DEVICE

摘要

In this light source device, which is provided with a discharge lamp (22) disposed along the horizontal direction and a reflecting mirror (21) of which the reflecting surface is a paraboloid of revolution, the discharge lamp (22) is disposed at the center of the reflecting mirror (21), whereas the central axis (E) of the lamp is disposed separated, in a parallel manner, from the central axis (T) of the reflecting mirror by a distance (d) along the vertical direction.