发明名称 MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
摘要 <p>Across the entire surface of a distribution area for a plurality of semiconductor elements, which are formed on a semiconductor substrate, a plurality of sealing sheet pieces of areas smaller than the distribution area and which are cut in accordance with scribe lines surrounding the plurality of the semiconductor elements, are attached. A semiconductor substrate (W), in which the sealing layer is cured so as to seal the semiconductor elements therein, is held in a ring frame via dicing tape and subsequently transported to a dicing step, cut along the scribe lines, and the dicing tape is expanded so as to manufacture a semiconductor device.</p>
申请公布号 WO2014167947(A1) 申请公布日期 2014.10.16
申请号 WO2014JP57175 申请日期 2014.03.17
申请人 NITTO DENKO CORPORATION 发明人 YAMAMOTO MASAYUKI;MORI SHINICHIROU
分类号 H01L21/56;H01L21/683 主分类号 H01L21/56
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