| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an oscillating mirror element capable of preventing deformation of a mirror section while preventing driving performance degradation which may be caused by additionally providing the mirror section with reinforcement ribs or the like.SOLUTION: A laser light scanning unit 110 (oscillating mirror element) of the present invention includes: a MEMS mirror 110a having a reflective surface 110b for reflecting light; torsion bars 111a (111b) and bars 112a (112b) which are connected with the MEMS mirror 110a to support the MEMS mirror 110a to allow the MEMS mirror 110a to oscillate about an axis thereof; and drive sections 113a and 113b which are connected with the torsion bars 111a (111b) and bars 112a (112b) to drive vibration of the MEMS mirror 110a via the torsion bars 111a (111b) and bars 112a (112b). At least the reflective surface 110b is formed to have a curved surface on the MEMS mirror 110a.</p> |
