SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE DELIVERY METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate inspection apparatus which delivers a substrate while securely holding the substrate, and to provide a substrate delivery method.SOLUTION: A substrate inspection apparatus 1 includes: a placement base 4a having multiple vacuum suction pads 61 for suctioning a wafer W; and a rear surface arm 10. The rear surface arm 10 includes: multiple vacuum suction pads 71 which conducts vacuum suction from an opening 42a2 to suction the wafer W; and multiple suction pads 72 which blow a predetermined gas from a pair of jet ports 41a to generate a negative pressure between themself and the wafer W and suction the wafer W.