| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device which prevents liquid supply pipelines connected with a polishing table from being damaged when the polishing table conducts translational movement along a circular orbit.SOLUTION: A polishing device includes: a polishing table 10 which has a polishing surface 16a and conducts translational movement along a circular orbit; a top ring 28 which presses a substrate W to the polishing surface 16a; a drive shaft 20 connected with the polishing table 10; a protection pipe 65 extending inside the drive shaft 20; liquid supply pipelines 60, 61 extending inside the protection pipe 65 and connected with a lower surface of the polishing table 10; and a support member 68 supporting the liquid supply pipelines 60, 61 in the protection pipe 65. |
