DRAWING DEVICE AND DRAWING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technology improving drawing accuracy of a pattern in a belt-shaped area of a substrate end.SOLUTION: A drawing device draws a pattern on a substrate 90 by irradiating belt-shaped drawing light to the substrate 90 formed photoreceptor. The drawing device comprises: multiple optical heads 33a-33e emitting the drawing light; a vertical scanning system making the optical heads 33a-33e move relatively to a vertical scanning direction (+x direction) for the substrate 90; and a horizontal scanning system making the optical heads 33a-33e move relatively to a horizontal scanning direction (+y and -y direction) for the substrate 90. Besides, the drawing device comprises an automatic focusing system 6 adjusting a focal position of the drawing light emitted from the multiple optical heads 33. The autofocus system 6 for the optical heads 33b-33e in the multiple optical heads 33 assumes a position on the substrate dragged to a direction (-x direction) opposite to the vertical scanning direction from a middle position CP of the drawing light as a detection position 71 detecting variation of an alienation distance L1.