发明名称 SUCTION COLLET, PICK-UP DEVICE, AND PICK-UP METHOD
摘要 PROBLEM TO BE SOLVED: To reduce the request accuracy of position measurement of a bear chip and a suction collet, and to decrease a necessary number of measurement.SOLUTION: A suction collet 102 is equipped with a first inclined surface 103 and a second inclined surface 104 which have respectively different inclined angles. With reference to the second inclined surface 104 which is gentler, a positional relationship between the suction collet 102 and a bear chip 105 is measured. The bear chip 105 is made to slide in a horizontal direction along the first inclined surface 103 which is sharper, thereby making the bear chip 105 horizontally abut on the suction collet 102. Pressure is reduced through a suction hole 108, and the bear chip 105 is horizontally picked up.
申请公布号 JP2014197641(A) 申请公布日期 2014.10.16
申请号 JP20130073376 申请日期 2013.03.29
申请人 NEC CORP 发明人 OGASAWARA TADAYUKI
分类号 H01L21/52 主分类号 H01L21/52
代理机构 代理人
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