| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing apparatus capable of improving strength of an object to be processed without causing any increase of defects nearby an end face.SOLUTION: A processing apparatus 1 which processes an end face of an object 3 to be processed by irradiating a surface 4 of the object 3 to be processed with light guides the light emitted by a light source 11 by a light guide part 12 to a position, which is a predetermined distance D inside from the end face 5 of the object 3 to be processed, on the surface 4 of the object 3 to be processed so as to irradiate the surface. An irradiation position 21 of the light on the surface 4 of the object 3 to be processed is a position inside a part nearby the end face of the object to be processed where a defect rate is high. In parallel with irradiating the object 3 to be processed with the light, the processing apparatus 1 moves the object 3 to be processed relatively in a direction Y perpendicular to the irradiation direction Z of the light emitted from the light guide part 3. Consequently, a linear processing structure 24 is formed at the position, which is the predetermined distance D inside from the end face 5, on the surface 4 of the object 3 to be processed. |
