发明名称 |
DELAMINATION APPARATUS AND INLINE THERMAL IMAGING SYSTEM |
摘要 |
A delamination apparatus includes a stage mounted with a lower supporting member, a donor film laminated to the lower supporting member, and an acceptor substrate sealed between the lower supporting member and the donor film, a first gripper positioned at an end side of the stage, the first gripper being configured to grip an end of the donor film and to move with the end of the donor film away from the acceptor substrate, and a first filling roll positioned over the donor film, the first filling roll being configured to blow ions toward the donor film while rotating toward the first gripper. |
申请公布号 |
US2014305591(A1) |
申请公布日期 |
2014.10.16 |
申请号 |
US201314144719 |
申请日期 |
2013.12.31 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
AHN Kyung-Hyun |
分类号 |
H01L51/56 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
1. A delamination apparatus, comprising:
a stage mounted with a lower supporting member, a donor film laminated to the lower supporting member, and an acceptor substrate sealed between the lower supporting member and the donor film; a first gripper positioned at an end side of the stage, the first gripper being configured to grip an end of the donor film and to move with the end of the donor film away from the acceptor substrate; and a first filling roll positioned over the donor film, the first filling roll being configured to blow ions toward the donor film while rotating toward the first gripper. |
地址 |
Yongin-City KR |