DIFFRACTION GRATING, DIFFRACTION GRATING ELEMENT, AND CHARGED PARTICLE BEAM DEVICE EQUIPPED WITH SAME

摘要

This charged particle beam device generates an electron vortex beam by passing a charged particle beam through (A) a diffraction grating which includes a plurality of edge dislocations of differing orders, or (B) a diffraction grating element comprising a plurality of diffraction gratings which include edge dislocations of differing orders. The electron vortex beam has a plurality of ring-like diffraction spots of differing diameters which overlap on the diffraction image plane, and therefore is suited to devices for which it is necessary to irradiate a wide sample region, such as a transmission electron microscope.