| 摘要 |
The present invention relates to a silicon photomultiplier with a strip-type P-N junction structure and a manufacturing method thereof and, more specifically, to a silicon photomultiplier with a strip-type P-N junction structure, and a manufacturing method thereof which forms an n+ layer on a p- epitaxial layer using an ordinary CMOS process, but forms the n+ layer as a strip structure in a band shape on the top of the p- epitaxial layer when a P-N junction layer of each microcell forming the silicon photomultiplier is formed. The silicon photomultiplier with the strip-type P-N junction structure makes an electron generated in the p- epitaxial layer by visible light inserted from a scintillator to be concentrated to an n+ layer of the strip structure, induces avalanche breakdown by the electron having excellent avalanche efficiency than a hole, and enhances detection efficiency of incident light. For the purpose mentioned above, the silicon photomultiplier (SiPM) which is formed of a plurality of microcells is provided. Each of the microcells forming the silicon photomultiplier comprises; a p+ wafer substrate; the p- epitaxial layer formed on the p+ wafer substrate; and an n+ layer which is doped on the p- epitaxial layer and is formed on the surface of the p- epitaxial layer as a strip structure in a band shape. |
