发明名称 HEAT EXCHANGER FOR COOLING A HEATING TUBE AND METHOD THEREOF
摘要 <p>A heat exchanger for cooling a heating tube is described, comprising at least two cooling pipes, wherein the at least two cooling pipes are arranged such that each of the at least two cooling pipes are configured to be in thermal contact with the heating tube; and a means for generating an aerosol being configured to provide the aerosol in the at least two cooling pipes.</p>
申请公布号 EP2788704(A1) 申请公布日期 2014.10.15
申请号 EP20110801675 申请日期 2011.12.09
申请人 APPLIED MATERIALS, INC. 发明人 HOFFMANN, GERD;SKUK, PETER
分类号 F28D5/00;F28D7/00 主分类号 F28D5/00
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