发明名称 Electro Plating Device
摘要 The invention relates to an electroplating device and, more particularly, to the electro plating device which reduces the anode-cathode distance to improve a deviation of plated thickness. The invention comprises a cathode to which a jig and a substrate are fixed; a nozzle pipe which injects the plating solution onto the surface fixed to the cathode; an anode case which includes an inserting hole for inserting the nozzle pipe and includes an anode inserting unit in both sides of inserting hole; an anode which is inserted into the anode inserting unit of anode case; and a shield which is installed closely to the anode inserting unit to block the hydrogen gas generated from the anode.
申请公布号 KR101451483(B1) 申请公布日期 2014.10.15
申请号 KR20120156867 申请日期 2012.12.28
申请人 发明人
分类号 C25D7/12;C25D17/00;H01L21/288 主分类号 C25D7/12
代理机构 代理人
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