发明名称 |
VIBRATION POWER GENERATION DEVICE AND METHOD FOR MANUFACTURING SAME |
摘要 |
Disclosed is a vibration power generation device which is provided with: a frame section; a weight section provided inside the frame section; a flexure section that is joined between the frame section and the weight section and is configured to bend in response to a displacement of the weight section; and a power generation section that is located at least at the flexure section and configured to generate an alternating-current voltage in response to a vibration of the weight section. The frame section and the weight section are formed of a silicon substrate. The power generation section comprises, at its own surface, an elastic film formed of a resin material. The flexure section comprises the elastic film formed of the resin material having a Young's modulus smaller than that of silicon forming the frame section and the weight section. |
申请公布号 |
EP2566038(A4) |
申请公布日期 |
2014.10.15 |
申请号 |
EP20110775093 |
申请日期 |
2011.04.28 |
申请人 |
PANASONIC CORPORATION |
发明人 |
OGAWA, JUNYA;YAMAUCHI, NORIHIRO;MATSUSHIMA, TOMOAKI;AIZAWA, KOICHI |
分类号 |
H02N2/18;H01L41/113 |
主分类号 |
H02N2/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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