| 摘要 |
An organic material deposition apparatus used to manufacture organic light emitting devices washes the materials deposited on a mask to enable the washed materials to be reused. The organic material deposition apparatus includes: a chamber storing a substrate inside; a substrate support unit which supports the substrate in the chamber; a belt mask which is arranged in the chamber to face the substrate and has a pattern selectively letting the deposition materials to pass through; a belt mask operation unit which rotates the belt mask; a source unit which supplies the deposition materials to the belt mask to selectively deposit the deposition materials on the substrate; and a heat source which pyrolyzes the deposition materials deposited on the belt mask in the chamber. Accordingly, the present invention can reduce the manufacturing costs. |
