| 摘要 |
<p>Provided is a measuring apparatus (1) that includes a heterodyne interferometer (100); a first detector (25) configured to detect interference light between reference light and light to be detected, and output a measured signal (41); a second detector (24) configured to detect interference light between first light having a first wavelength and second light having a second wavelength different from the first wavelength, and output a reference signal (42); an oscillator (43; 43a-43c) configured to generate a standard signal having a frequency corresponding to a frequency shift amount; a first synchronization detector (44a, 44b) configured to perform synchronous detection of the measured signal (41) and the standard signal; a second synchronization detector (44c, 44d) configured to perform synchronous detection of the reference signal (42) and the standard signal; a first processing means (46; 46a, 46b) that determines a phase difference between the measured signal (41) and the reference signal (42) based on the outputs of the first synchronization detector (44a, 44b) and the second synchronization detector (44c, 44d); and a second processing means (47) that determines the position based on the phase difference.</p> |
