发明名称 METHOD FOR PRODUCING ORGANIC THIN FILM BY USING FILM PHYSICAL PROPERTY IMPROVING PROCESS
摘要 <p>The object of the present invention is to provide a method for producing an organic thin film which film properties such as heat resistance or durability are improved. It is a method for producing an organic thin film for forming an organic thin film on a substrate surface, comprising at least a step (B) of allowing the substrate to contact with an organic solvent solution comprising a metal surfactant having at least one or more hydrolysable group or hydroxyl group, and a catalyst that can interact with the metal surfactant, wherein the method further comprises after the step (B), a step (E1) of heating the substrate which has been in contact with the organic solvent solution at 100°C to 150°C; a step (E2) of immersing the substrate which has been in contact with the organic solvent solution in a warm water of 40°C or more and less than the boiling point; or a step (E3) of allowing the substrate which has been in contact with the organic solvent solution to contact with a moisture vapor of 60°C to 150°C.</p>
申请公布号 EP2047917(B1) 申请公布日期 2014.10.15
申请号 EP20070791624 申请日期 2007.07.31
申请人 NIPPON SODA CO., LTD. 发明人 KUMAZAWA, KAZUHISA
分类号 B05D7/24;B01J10/02;B01J19/00;B05D1/18;B05D3/02;B05D3/04;B05D3/10;B82Y30/00;B82Y40/00 主分类号 B05D7/24
代理机构 代理人
主权项
地址