Laser system and laser light generation method

摘要

A laser system may include: a master oscillator configured to output pulsed laser light; an amplification device for amplifying the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the master oscillator outputs the pulsed laser light; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device.

主权项

1. A laser system comprising:
a master oscillator configured to generate pulsed laser light; an amplification device configured to amplify the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the pulsed laser light passes through a predetermined position; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device, wherein the master oscillator includes: a pumping laser configured to output pumping light; a seed laser configured to oscillate by irradiation with the pumping light; and an amplifier configured to amplify the pulsed laser light generated by the seed laser using the pumping light, wherein the controller is configured to control at least one of a timing at which the pumping laser oscillates and a timing at which the amplification device discharges based on the results of detection by the first timing detector and the second timing detector.