Method for producing solar cell and film-producing device

摘要

Disclosed in a method that is for producing a solar cell and that is characterized by performing an annealing step on a semiconductor substrate before an electrode-forming step. By means of performing annealing in the above manner, it is possible to improve the electrical characteristics of the solar cell without negatively impacting reliability or outward appearance. As a result, the method can be widely used in methods for producing solar cells having high reliability and electrical characteristics.

主权项

1. A method for producing a solar cell, comprising, in the recited order, the steps of:
forming an antireflection/passivation film on a semiconductor substrate, annealing the substrate, forming electrodes on the substrate, and firing the electrodes, wherein the passivation film is any one of MgF2, SiO2, Al2O3, SiO, SiN, TiO2, Ta2O5, and ZnS, or a stack of such layers.