| 主权项 |
1. A system for combinatorial processing of a substrate in a processing chamber, comprising:
a shield disposed within the chamber, wherein the shield comprises an aperture, wherein the aperture is configured to define site isolated regions on the surface of the substrate; a plurality of independent power generators, each power generator having a corresponding output power port; a plurality of sputter guns configured to provide sputtered material on to the site isolated regions of the surface of the substrate; a switchbox comprising a plurality of switchbox input ports, a plurality of switchbox output ports, and a plurality of coaxial switches configured to selectively deliver power from at least one of the plurality of generators to at least one of the plurality of sputter guns; and a controller positioned within the switchbox configured to selectively deliver power from a specific generator to a specific sputter gun under programmable logic control; wherein each output power port of the plurality of generators is connected to a single corresponding switchbox input port, and each of the plurality of sputter guns is connected to a single corresponding switchbox output; and wherein each coaxial switch is one of a single pole-double throw switch, a single pole-triple throw switch, or a single pole-four throw switch. |
