SUBSTRATE ROLL, PLASMA TREATMENT METHOD THEREOF AND APPARATUS FOR PLASMA TREATMENT

摘要

The present invention relates to a substrate roll, a plasma treatment method thereof, and a plasma treating device. According to an embodiment of the present invention, the substrate roll includes substrates reeled in a roll; a slip film provided between the substrates and reeled with the substrates; and a plurality of spacers provided on both sides of the slip films, spacing the slip film and the substrate, and provided spaced from each other.