Alignment system and method for operating the same

摘要

An alignment system includes a stage configured to retain an object, an image-capturing device configured to capture the image of the field of view of the microscope, and a processing module configured to generate a virtual mask and superimpose the virtual mask with the image of the object. In one embodiment of the present invention, a method for operating a virtual mask system includes the steps of generating a virtual mask, placing a first object on a stage, capturing at least one image of the first object, and superimposing the virtual mask with the image of the first object by adjusting a position or an inclined angle of the stage or adjusting a capturing position of an image-capturing device by considering at least the virtual mask and the image of the first object.

主权项

1. An alignment system, comprising:
a stage configured to retain a first object and a second object; a virtual mask having a layout design of the first object, a layout design of the second object, and a relative position of the first object to the second object; an image-capturing device configured to capture at least one image of the first object and at least one image of the second object; a processing module configured to read the virtual mask for at least one alignment,
wherein the processing module is configured to align the layout design of the first object of the virtual mask with the image of the first object for a first alignment, wherein the first object is placed according to the first alignment,wherein the processing module is configured to align the layout design of the second object of the virtual mask with the image of the second object for a second alignment, wherein the second object is placed according to the second alignment; and an apparatus configured to pick up the first object from the stage after the first alignment and to couple the first object with the second object after the second object is placed on the stage after the second alignment.