发明名称 Memory cells and methods of forming memory cells
摘要 Some embodiments include memory cells having programmable material between a pair of electrodes. The programmable material includes a material selected from the group consisting of a metal silicate with a ratio of metal to silicon within a range of from about 2 to about 6, and metal aluminate with a ratio of metal to aluminum within a range of from about 2 to about 6. Some embodiments include methods of forming memory cells. First electrode material is formed. Programmable material is formed over the first electrode material, with the programmable material including metal silicate and/or metal aluminate. Second electrode material is formed over the programmable material, and then an anneal is conducted at a temperature within a range of from about 300° C. to about 500° C. for a time of from about 1 minute to about 1 hour.
申请公布号 US8859329(B2) 申请公布日期 2014.10.14
申请号 US201414259376 申请日期 2014.04.23
申请人 Micron Technology, Inc. 发明人 Ramaswamy D. V. Nirmal;Balakrishnan Murali;Torsi Alessandro;Rocklein Noel
分类号 H01L29/02;H01L45/00 主分类号 H01L29/02
代理机构 Wells St. John P.S. 代理人 Wells St. John P.S.
主权项 1. A method of forming a memory cell, comprising: forming first electrode material over a base; forming programmable material over the first electrode material; the programmable material comprising a region comprising a composition selected from the group consisting of a metal silicate with a ratio of metal to silicon within a range of from about 2 to about 6, and a metal aluminate with a ratio of metal to aluminum within a range of from about 2 to about 6; and forming second electrode material over the programmable material and subsequently annealing the programmable material.
地址 Boise ID US