Structure and method for a fishbone differential capacitor

摘要

The present disclosure provides an integrated circuit. The integrated circuit includes a substrate having a surface that is defined by a first axis and a second axis perpendicular to the first axis; and a capacitor structure disposed on the substrate. The capacitor structure includes a first conductive component; a second conductive component and a third conductive component symmetrically configured on opposite sides of the first conductive component. The first, second and third conductive components are separated from each other by respective dielectric material.

主权项

1. An integrated circuit, comprising:
a substrate having a surface that is defined by a first axis and a second axis perpendicular to the first axis; and a capacitor structure disposed on the substrate, wherein the capacitor structure includes:
a first conductive component,a second conductive component and a third conductive component symmetrically configured on opposite sides of the first conductive component, wherein the first, second, and third conductive components are separated from each other by a respective dielectric material,a first conductive shielding feature electrically connected to the first conductive component, anda second conductive shielding feature electrically connected to the second conductive component.