Method and system of evaluating distribution of lattice strain on crystal material

摘要

A crystal material lattice strain evaluation method includes illuminating a sample having a crystal structure with an electron beam in a zone axis direction, and selectively detecting a certain diffracted wave diffracted in a certain direction among a plurality of diffracted waves diffracted by the sample. The method further includes repeating the illuminating step and the selectively detecting step while scanning the sample, and obtaining a strain distribution image in a direction corresponding to the certain diffracted wave from diffraction intensity at each point of the sample.

主权项

1. A method comprising:
mapping a strain distribution image; wherein the mapping the strain distribution image comprises: (a) capturing a diffraction pattern including a plurality of diffraction waves that are diffracted by illuminating an electron beam to a sample including a single-crystal structure in a zone axis direction; (b) selectively detecting a selected diffraction wave among the plurality of diffraction waves in the diffraction pattern; repeating (a) and (b) at a plurality of measurement points while scanning the sample with the electron beam; and imaging the strain distribution associated with the selected diffraction wave detected at each of the plurality of measurement points, the strain distribution being described as a contrast image based on intensities of the plurality of detected diffraction waves at the respective measurement points.