Integrated cross-tester analysis and real-time adaptive test

摘要

Processing test results from a plurality of individual semiconductor testers by analyzing each test result at an adaptive test engine. A centralized system jointly analyzes all the test results from the plurality of individual semiconductor testers. The adaptive test engine or the centralized system identifies, based on the analysis of each test result or the joint analysis of all the test results, one or more of: a test environmental issue, a tester variability issue, a tester calibration issue, a product variability issue, and a manufacturing process variability issue. The adaptive test engine or the centralized system determines whether one or more of the plurality of individual semiconductor testers causes one or more of the identified issues or whether semiconductor products tested by the plurality of individual semiconductor testers causes one or more of the identified issues.

主权项

1. A computer-implemented apparatus for processing test results from a plurality of individual semiconductor testing systems for testing a semiconductor product, the system comprising:
a memory device; and a processor unit in communication with the memory device, the processor unit performs steps of: receiving the test results from the plurality of individual semiconductor testing systems, a testing system comprising: a semiconductor tester, a transformer and a probe card; analyzing each test result at a local adaptive test engine corresponding to an individual semiconductor testing system; jointly analyzing a plurality of the test results from the plurality of individual semiconductor testing systems, the jointly analyzing the plurality of the test results including: comparing the test results to determine whether a particular testing system causes one or more issues, to determine whether a particular testing system component causes the one or more issues, and to determine whether a particular semiconductor product causes the one or more issues, the one or more issues including: a test environmental issue, a testing system variability issue, a testing system calibration issue, a product variability issue, and a manufacturing process variability issue, a testing system component variability issue, a testing system component calibration issue; based on the determinations of the one or more issues, interchanging a plurality of testing system components between the plurality of testing systems; and running one or more tests on the plurality of testing systems after the interchanging.