Bare aluminum baffles for resist stripping chambers

摘要

Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer.

主权项

1. A method of stripping resist from a substrate in a resist stripping chamber, the method comprising:
energizing a process gas into the plasma state remotely from the resist stripping chamber and supplying reactive species into the resist stripping chamber in which a semiconductor substrate including a resist is supported on a substrate support, the resist stripping chamber including a sidewall and a bare aluminum baffle supported by the sidewall and forming a top wall of the resist stripping chamber; and distributing the reactive species onto the substrate through gas passages in the baffle so as to remove the resist from the substrate, wherein the bare aluminum baffle comprises a lower surface, an inner portion and a peripheral portion, wherein the inner portion includes a central projection comprising a portion of the bare aluminum baffle having a thickness greater than the peripheral portion and a plurality of concentrically arranged rows of the gas passages surrounding the central projection, the central projection includes an upper surface and a plurality of through passages extending from the upper surface to the lower surface and oriented at an acute angle relative to the upper surface such that the through passages extend in radial outward directions toward the peripheral portion, and the peripheral portion includes a flange having holes adapted to receive fasteners to attach the baffle to the sidewall.