| 摘要 |
PURPOSE: An apparatus for elevating the chuck stage of a bonding unit is provided to improve the efficiency of a bonding operation by forming a structure which stands a vertical loading with respect to the chuck stage. CONSTITUTION: An eccentric cam(10) is rotated by a driving motor(11). A horizontal slider(20) horizontally moves by the rotation of the eccentric cam. A chuck stage(30) is vertically elevated by the movement of the horizontal slider. A plurality of horizontal sliders is prepared. A linkage connects the horizontal sliders. The horizontal sliders are simultaneously driven by the rotation of the eccentric cam. |
