High throughput solar cell ablation system

摘要

A solar cell is formed using a solar cell ablation system. The ablation system includes a single laser source and several laser scanners. The laser scanners include a master laser scanner, with the rest of the laser scanners being slaved to the master laser scanner. A laser beam from the laser source is split into several laser beams, with the laser beams being scanned onto corresponding wafers using the laser scanners in accordance with one or more patterns. The laser beams may be scanned on the wafers using the same or different power levels of the laser source.

主权项

1. A solar cell ablation system comprising:
a single laser source; a first laser scanner adapted to direct a first laser beam from the single laser source to scan on a first wafer in accordance with a first pattern in a first station; a transport adapted to move the first wafer from the first station to a second station; and a second laser scanner adapted to direct a second laser beam from the single laser source to scan on the first wafer in accordance with a second pattern in the second station.