Plating apparatus and wire inspection method of the same

摘要

When a controller turns on a relay, a closed circuit constituted by a power supply device, a wire, a resistance, a relay and wires is formed. This causes a current to flow through the closed circuit. The power supply device performs constant current control. The controller compares a measured voltage value output from a voltage detecting circuit with a preset reference voltage value. In the case of no connection failure of the wire, the measured voltage value substantially equals to the reference voltage value. In the case of connection failure of the wire, the measured voltage value is larger than the reference voltage value.

主权项

1. A plating apparatus that performs electrolytic plating on an object, comprising:
a plating tank for containing a plating solution; an anode provided in said plating tank; a conductive member capable of coming in contact with said object; a DC power supply; a first wire arranged to electrically connect the anode and one electrode of the DC power supply; a second wire arranged to connect the conductive member and another electrode of the DC power supply; a circuit for inspection; and a detector that detects the presence/absence of connection failure of the first and second wires, wherein the circuit for inspection includes a load and a switch that are connected in series between the anode and the conductive member, the switch having (i) an off position wherein the load is not electrically coupled to the conductive member or the anode during plating of the object, and (ii) an on position wherein the load is electrically coupled to the conductive member and the anode during inspection of the first and second wires, the DC power supply having a function of performing constant current control such that a constant current flows through said load during the inspection of said first and second wires, and the detector detects a voltage of the DC power supply during the inspection of the first and second wires, and detects the presence or absence of a connection failure of the first and second wires based on the detected voltage.