发明名称 METHOD OF INSPECTING FOREIGN SUBSTANCE ON A BOARD
摘要 A method for inspecting foreign materials on a substrate comprises: a step of firstly displaying image information of a substrate prior to lead coating, in order to inspect the substrate; a step of photographing at least one measurement area on the substrate in order to obtain images of the photographed measurement area; a step of updating the displayed image information using the obtained images of the measurement area, and displaying the updated image information; and a step of comparing the obtained images of the measurement area with a reference image of the substrate, and inspecting the existence of foreign materials, in order to inspect the foreign materials. Therefore, using the inspecting method, a worker can easily identify the position of a certain part on the actual substrate corresponding to a specific part of the displayed images of the substrate, and can easily detect foreign materials existing on the substrate.
申请公布号 KR20140120821(A) 申请公布日期 2014.10.14
申请号 KR20140032676 申请日期 2014.03.20
申请人 KOH YOUNG TECHNOLOGY INC. 发明人 LEE, HYUN SEOK;YANG, JAE SIK;KIM, JA GEUN;KIM, HEE TAE;YOU, HEE WOOK
分类号 G01N21/88;G01N21/17;G01N21/94 主分类号 G01N21/88
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