发明名称 PLATE-LIKE OBJECT HAVING WITH ALIGNMENT MARK
摘要 <p>The purpose of the present invention is to reduce the time required for alignment. According to the present invention, an alignment mark (19) for alignment recognized by a photographing means (9) of an alignment device (1) is formed on a surface of a plate-type object (3). Direction indicating marks (21) indicate a direction from a formed place to the alignment mark (19). The direction indicating marks (21) are formed at intervals to enable the field of view of the photographing means (9) to include a plurality of direction indicating marks. The plurality of direction indicating marks (21) are formed to surround the alignment mark (19).</p>
申请公布号 KR20140120845(A) 申请公布日期 2014.10.14
申请号 KR20140039423 申请日期 2014.04.02
申请人 DISCO CORPORATION 发明人 MAEDA NOBUHIDE
分类号 H01L23/544 主分类号 H01L23/544
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