Electrostatic actuator of a mobile structure with improved relaxation of trapped charges

摘要

The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing the first actuating bump. An electrostatic actuating circuit moves the actuating bumps with respect to one another between a first position and another position. The actuating circuit comprises a device for applying a higher potential on the second actuating bump than on the first actuating bump. A film of electrically insulating material performs electric insulation between the first and second bumps. The electrically insulating material film comprises an interface with a positive ion source and is permeable to said positive ions.

主权项

1. An electrostatic actuator comprising:
a first bump made from electrically conducting material with a first contact surface, a second bump made from electrically conducting material with a second contact surface, an electrostatic actuating circuit to move the first and second bumps with respect to one another, the actuating circuit comprising means for applying a potential difference between the first and second bumps, a positive ion source devoid of water vapour, a film of electrically insulating material permeable to positive ions performing electric insulation between the first and second bumps and comprising an interface with the positive ion source, wherein negative charges are introduced and trapped into the film, and wherein the positive ions penetrate into the film and are electrostatically attracted to the trapped negative charges so as to form electrically neutral elements.