发明名称 |
Thin light emitting diode and fabrication method |
摘要 |
A method for fabrication a light emitting diode (LED) includes growing a crystalline LED structure on a growth substrate, forming alternating material layers on the LED structure to form a reflector on a back side opposite the growth substrate and depositing a stressor layer on the reflector. A handle substrate is adhered to the stressor layer. The LED structure is separated from the growth substrate using a spalling process to expose a front side of the LED structure. |
申请公布号 |
US8860005(B1) |
申请公布日期 |
2014.10.14 |
申请号 |
US201313962564 |
申请日期 |
2013.08.08 |
申请人 |
International Business Machines Corporation |
发明人 |
Bedell Stephen W.;Hekmatshoartabari Bahman;Sadana Devendra K.;Shahrjerdi Davood |
分类号 |
H01L29/06;H01L33/06;H01L33/10 |
主分类号 |
H01L29/06 |
代理机构 |
Tutunjian & Bitetto, P.C. |
代理人 |
Tutunjian & Bitetto, P.C. ;Percello Louis J. |
主权项 |
1. A method for fabricating a light emitting diode (LED), comprising:
growing a crystalline LED structure on a growth substrate; forming alternating material layers on the LED structure to form a reflector on a back side opposite the growth substrate; depositing a stressor layer on the reflector; adhering a handle substrate to the stressor layer; and separating the LED structure from the growth substrate using a spalling process to expose a front side of the LED structure. |
地址 |
Armonk NY US |