发明名称 |
Test schemes and apparatus for passive interposers |
摘要 |
A probe card includes a plurality of probe pins, and a switch network connected to the plurality of probe pins. The switch network is configured to connect the plurality of probe pins in a first pattern, and reconnect the plurality of probe pins in a second pattern different from the first pattern. |
申请公布号 |
US8860448(B2) |
申请公布日期 |
2014.10.14 |
申请号 |
US201113184008 |
申请日期 |
2011.07.15 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Lee Yun-Han;Wang Mill-Jer;Chou Tan-Li |
分类号 |
G01R31/20;G01R1/073 |
主分类号 |
G01R31/20 |
代理机构 |
Slater & Matsil, L.L.P. |
代理人 |
Slater & Matsil, L.L.P. |
主权项 |
1. An apparatus comprising:
a probe card comprising: a plurality of probe pins, with neighboring ones of the plurality of probe pins having a first pitch; and a switch network connected to the plurality of probe pins, wherein the switch network is configured to:
connect the plurality of probe pins in a first pattern; andreconnect the plurality of probe pins in a second pattern different from the first pattern; and an interposer comprising a plurality of contact pads in contact with the plurality of probe pins, wherein neighboring ones of the plurality of contact pads have a second pitch smaller than the first pitch, and wherein the probe pins are placed in electrical contact with a first plurality of contact pads, and wherein, after the probe pins are placed in electrical contact with a first plurality of contact pads the position of the interposer is shifted to put the plurality of probe pins in contact with a second plurality of contact pads of the interposer different from the first plurality of contact pads. |
地址 |
Hsin-Chu TW |