发明名称 Test schemes and apparatus for passive interposers
摘要 A probe card includes a plurality of probe pins, and a switch network connected to the plurality of probe pins. The switch network is configured to connect the plurality of probe pins in a first pattern, and reconnect the plurality of probe pins in a second pattern different from the first pattern.
申请公布号 US8860448(B2) 申请公布日期 2014.10.14
申请号 US201113184008 申请日期 2011.07.15
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Lee Yun-Han;Wang Mill-Jer;Chou Tan-Li
分类号 G01R31/20;G01R1/073 主分类号 G01R31/20
代理机构 Slater & Matsil, L.L.P. 代理人 Slater & Matsil, L.L.P.
主权项 1. An apparatus comprising: a probe card comprising: a plurality of probe pins, with neighboring ones of the plurality of probe pins having a first pitch; and a switch network connected to the plurality of probe pins, wherein the switch network is configured to: connect the plurality of probe pins in a first pattern; andreconnect the plurality of probe pins in a second pattern different from the first pattern; and an interposer comprising a plurality of contact pads in contact with the plurality of probe pins, wherein neighboring ones of the plurality of contact pads have a second pitch smaller than the first pitch, and wherein the probe pins are placed in electrical contact with a first plurality of contact pads, and wherein, after the probe pins are placed in electrical contact with a first plurality of contact pads the position of the interposer is shifted to put the plurality of probe pins in contact with a second plurality of contact pads of the interposer different from the first plurality of contact pads.
地址 Hsin-Chu TW