发明名称 |
Resistive memory device and fabrication method thereof |
摘要 |
A resistive memory device capable of implementing a multi-level cell (MLC) and a fabrication method thereof are provided. The resistive memory device includes a lower electrode connected to a switching device and including a first node and a second node formed on a top thereof to be spaced at a fixed interval, a phase-change material pattern formed on the first node and the second node, an upper electrode formed on the phase-change material pattern, a conductive material layer formed on a top and outer sidewall of the upper electrode, a first contact plug formed on one edge of the upper electrode to be connected to the upper electrode and the conductive material layer, and a second contact plug formed on the other edge of the upper electrode to be connected to the upper electrode and the conductive material layer. |
申请公布号 |
US8860003(B2) |
申请公布日期 |
2014.10.14 |
申请号 |
US201313791561 |
申请日期 |
2013.03.08 |
申请人 |
SK hynix Inc. |
发明人 |
Oh Jae Min |
分类号 |
H01L47/00;H01L45/00;H01L27/24 |
主分类号 |
H01L47/00 |
代理机构 |
Kilpatrick Townsend & Stockton LLP |
代理人 |
Kilpatrick Townsend & Stockton LLP |
主权项 |
1. A resistive memory device, comprising:
a lower electrode connected to a switching device and including a first node and a second node formed on a top thereof to be spaced at a fixed interval; a phase-change material pattern formed on the first node and the second node; an upper electrode formed on the phase-change material pattern; a conductive material layer formed on a top and outer sidewall of the upper electrode; a first contact plug formed on one edge of the top of the upper electrode to be connected to the upper electrode and the conductive material layer; and a second contact plug formed on the other edge of the top of the upper electrode to be connected to the upper electrode and the conductive material layer. |
地址 |
Icheon-si KR |