发明名称 Resistive memory device and fabrication method thereof
摘要 A resistive memory device capable of implementing a multi-level cell (MLC) and a fabrication method thereof are provided. The resistive memory device includes a lower electrode connected to a switching device and including a first node and a second node formed on a top thereof to be spaced at a fixed interval, a phase-change material pattern formed on the first node and the second node, an upper electrode formed on the phase-change material pattern, a conductive material layer formed on a top and outer sidewall of the upper electrode, a first contact plug formed on one edge of the upper electrode to be connected to the upper electrode and the conductive material layer, and a second contact plug formed on the other edge of the upper electrode to be connected to the upper electrode and the conductive material layer.
申请公布号 US8860003(B2) 申请公布日期 2014.10.14
申请号 US201313791561 申请日期 2013.03.08
申请人 SK hynix Inc. 发明人 Oh Jae Min
分类号 H01L47/00;H01L45/00;H01L27/24 主分类号 H01L47/00
代理机构 Kilpatrick Townsend & Stockton LLP 代理人 Kilpatrick Townsend & Stockton LLP
主权项 1. A resistive memory device, comprising: a lower electrode connected to a switching device and including a first node and a second node formed on a top thereof to be spaced at a fixed interval; a phase-change material pattern formed on the first node and the second node; an upper electrode formed on the phase-change material pattern; a conductive material layer formed on a top and outer sidewall of the upper electrode; a first contact plug formed on one edge of the top of the upper electrode to be connected to the upper electrode and the conductive material layer; and a second contact plug formed on the other edge of the top of the upper electrode to be connected to the upper electrode and the conductive material layer.
地址 Icheon-si KR