Methods for preparing thin samples for TEM imaging

摘要

A method and apparatus for preparing thin TEM samples in a manner that reduces or prevents bending and curtaining is realized. Embodiments of the present invention deposit material onto the face of a TEM sample during the process of preparing the sample. In some embodiments, the material can be deposited on a sample face that has already been thinned before the opposite face is thinned, which can serve to reinforce the structural integrity of the sample and refill areas that have been over-thinned due to a curtaining phenomena. In other embodiments, material can also be deposited onto the face being milled, which can serve to reduce or eliminate curtaining on the sample face.

主权项

1. A method of preparing a sample for TEM analysis, the method comprising:
at least partially separating a sample section containing a feature of interest from a bulk substrate; thinning a first side of the sample to expose a first sample face; depositing a layer of a material onto the exposed first sample face; and thinning a second side of the sample; wherein thinning the first side of the sample to expose the first sample face and depositing the layer of material onto the exposed first sample face is performed simultaneously.