| 摘要 |
Disclosed is an apparatus for decomposing perfluorocarbons (PFCs) and harmful gases using a high-density confined plasma source. The apparatus according to the present invention comprises: a reactor including a chamber having an inlet and an outlet formed at upper and lower portions for introducing and discharging PFCs and harmful gases, respectively, and a path defined therein, a ferrite core formed outside the chamber, and a permanent magnet disposed around the ferrite core, and connected to an antenna; a gas supply part for supplying, into the reactor, gas for decomposing the PFCs and harmful gases; a generator and a controller for supplying power to the antenna of the reactor. According to the apparatus of the present invention, high-density plasma is formed in the reactor having a doughnut-shaped loop by using the ferrite core and magnetic field, and the plasma is confined by using the inductively coupled plasma (ICP) and the magnetic field, so that plasma spreading may be prevented and decomposition efficiency for gases, such as PFCs, may be enhanced. |
