| 摘要 |
<p>The scribing wheel achieves increase in its longevity and ensures high strength in end face of segmented substrate obtained by severing brittle material-made substrate scribed by the scribing wheel. Disc-shaped scribing-wheel base material in use is so designed that mid-portion of disc periphery has the largest diameter. Diamond film is formed on the periphery by CVD method. The periphery is ground in the middle so that a plane including a circle defined by ridge line becomes perpendicular to the central axis of the scribing wheel. This helps reduce the roughness of ridge part. When the scribing wheel is used for scribing on brittle material-made substrate, upon severing of the scribed substrate, the end face of the segmented substrate can be made with greater accuracy and higher strength. The scribing wheel suffers little from abrasion at its ridge part even under continuous scribing, and thus enjoys longer operating life.</p> |
