发明名称 RESIST COMPOSITION, AND RESIST FILM AND NEGATIVE-TYPE PATTERN FORMING METHOD FOR USING THE SAME
摘要 <p>A resist composition includes a resin (A) containing any of repeating units (a) of general formulae (I-a) and (I-b) below and any of repeating units (b) of general formula (II) below but containing substantially no repeating unit in which an alcoholic hydroxyl group is introduced, and any of compounds (B) of general formulae (III-a) and (III-b) below.</p>
申请公布号 KR101450030(B1) 申请公布日期 2014.10.13
申请号 KR20120019699 申请日期 2012.02.27
申请人 发明人
分类号 G03F7/004;G03F7/26 主分类号 G03F7/004
代理机构 代理人
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